11 February 2011 Fabrication of singulated micro-retro-reflectors for textured surfaces
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The application of clusters of independent micro-retro-reflectors on various surfaces is of interest for cases of detection, identification and optical discrimination; both for distance viewing and machine remote vision. We present the fabrication steps for singulated micro-retro-reflectors using conventional photolithography and optical coating processes. The micro-optical elements presented here retro-reflect coherent or incoherent interrogating light beams, at large distances, with a high optical signal-to-background ratio. Due to the unpredictable topography of target surfaces, it was desirable for the individual retro-reflectors to be small (<50μm on a cube side or diameter on a sphere), but not as small as to be biological inhalation hazards. They were also required to be chemically inert. The retro-reflectors were tested at visible and near infrared wavelengths.
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Menelaos K. Poutous, Menelaos K. Poutous, Michael J. Maston, Michael J. Maston, Stephen Leibholtz, Stephen Leibholtz, Eric G. Johnson, Eric G. Johnson, } "Fabrication of singulated micro-retro-reflectors for textured surfaces", Proc. SPIE 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV, 79270J (11 February 2011); doi: 10.1117/12.875352; https://doi.org/10.1117/12.875352


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