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14 February 2011 Diamond milling or turning for the fabrication of micro lens arrays: comparing different diamond machining technologies
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Abstract
Diamond-micro milling and ultra-precision free-form turning technologies for fabricating micro lens arrays (MLA) with a large number of lenslets are explained in detail and compared. Besides the programming of the toolpath, correction loops and cutting parameters are presented. Both technologies are compared regarding achievable form deviation, roughness and economic factors like machining time. The paper offers a guideline for ultra-precision machining of micro lens array master molds on planar substrates and curved surfaces.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sebastian Scheiding, Allen Y. Yi, Andreas Gebhardt, Roman Loose, Lei Li, Stefan Risse, Ramona Eberhardt, and Andreas Tünnermann "Diamond milling or turning for the fabrication of micro lens arrays: comparing different diamond machining technologies", Proc. SPIE 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV, 79270N (14 February 2011); https://doi.org/10.1117/12.874751
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