14 February 2011 Cascaded silicon-on-insulator microring resonators for the detection of biomolecules in PDMS microfluidic channels
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Abstract
Silicon-On-Insulator (SOI) photonic microring resonators have shown promising potential for real time detection of biomolecules because of the sensitivity towards surface binding events. Previous work shows the use of single ring resonators for sensing applications. Each ring requires an input and output coupler and can be addressed only one at a time. We propose a novel use of cascaded ring resonators (width w = 200 nm and bending Radius R = 30 μm) together with a PDMS microfluidic network fabricated by soft lithography to expose each ring individually with different solutions. The SOI substrate with the planar waveguides and the PDMS with the microchannels are reversibly bonded to each other. The use of cascaded ring resonators offers the possibility to measure transmission spectra of multiple rings in different channels simultaneously. We measured Q-factors of >30'000 in air and >10'000 when exposed to water. Using a water/glycerin solution with known refractive indices we determine the sensitivity to be ~40 nm/RIU.
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Jonas Flueckiger, Jonas Flueckiger, Samantha M. Grist, Samantha M. Grist, Gurpal Bisra, Gurpal Bisra, Lukas Chrostowski, Lukas Chrostowski, Karen C. Cheung, Karen C. Cheung, } "Cascaded silicon-on-insulator microring resonators for the detection of biomolecules in PDMS microfluidic channels", Proc. SPIE 7929, Microfluidics, BioMEMS, and Medical Microsystems IX, 79290I (14 February 2011); doi: 10.1117/12.873974; https://doi.org/10.1117/12.873974
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