Cascaded silicon-on-insulator microring resonators for the detection of biomolecules in PDMS microfluidic channels

Jonas Flueckiger; Samantha M. Grist; Gurpal Bisra; Lukas Chrostowski; Karen C. Cheung

doi:10.1117/12.873974

14 February 2011 Cascaded silicon-on-insulator microring resonators for the detection of biomolecules in PDMS microfluidic channels

Jonas Flueckiger, Samantha M. Grist, Gurpal Bisra, Lukas Chrostowski, Karen C. Cheung

Author Affiliations +

Proceedings Volume 7929, Microfluidics, BioMEMS, and Medical Microsystems IX; 79290I (2011) https://doi.org/10.1117/12.873974
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

Silicon-On-Insulator (SOI) photonic microring resonators have shown promising potential for real time detection of biomolecules because of the sensitivity towards surface binding events. Previous work shows the use of single ring resonators for sensing applications. Each ring requires an input and output coupler and can be addressed only one at a time. We propose a novel use of cascaded ring resonators (width w = 200 nm and bending Radius R = 30 μm) together with a PDMS microfluidic network fabricated by soft lithography to expose each ring individually with different solutions. The SOI substrate with the planar waveguides and the PDMS with the microchannels are reversibly bonded to each other. The use of cascaded ring resonators offers the possibility to measure transmission spectra of multiple rings in different channels simultaneously. We measured Q-factors of >30'000 in air and >10'000 when exposed to water. Using a water/glycerin solution with known refractive indices we determine the sensitivity to be ~40 nm/RIU.

Citation Download Citation

Jonas Flueckiger, Samantha M. Grist, Gurpal Bisra, Lukas Chrostowski, and Karen C. Cheung "Cascaded silicon-on-insulator microring resonators for the detection of biomolecules in PDMS microfluidic channels", Proc. SPIE 7929, Microfluidics, BioMEMS, and Medical Microsystems IX, 79290I (14 February 2011); https://doi.org/10.1117/12.873974

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available