Real-time ultrafast optical interferometry of NEMS operating in fluidic environment

Oleksiy Svitelskiy; Vince Sauer; Ning Liu; Kar-Mun Cheng; Eric Finley; Mark R. Freeman; Wayne K. Hiebert

doi:10.1117/12.875752

14 February 2011 Real-time ultrafast optical interferometry of NEMS operating in fluidic environment

Oleksiy Svitelskiy, Vince Sauer, Ning Liu, Kar-Mun Cheng, Eric Finley, Mark R. Freeman, Wayne K. Hiebert

Proceedings Volume 7929, Microfluidics, BioMEMS, and Medical Microsystems IX; 79290V (2011) https://doi.org/10.1117/12.875752
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

Interactions of NEMS with fluids are of interest both in determining the NEMS performance outside of vacuum, and in elucidation of fluid dynamics at these small scales. We present a comprehensive study of nanomechanical damping in three gases (He, N₂, CO₂), and liquid CO₂. Resonant dynamics in multiple devices of varying size and frequency (10-400 MHz) is measured over 10 decades of pressure (1 mPa-20 MPa). We find a fluid relaxation time model to be valid throughout, but not beyond, the non-Newtonian regime (up to several atmospheres), and classical vibrating spheres model to be valid in the viscous limit.

Citation Download Citation

Oleksiy Svitelskiy, Vince Sauer, Ning Liu, Kar-Mun Cheng, Eric Finley, Mark R. Freeman, and Wayne K. Hiebert "Real-time ultrafast optical interferometry of NEMS operating in fluidic environment", Proc. SPIE 7929, Microfluidics, BioMEMS, and Medical Microsystems IX, 79290V (14 February 2011); https://doi.org/10.1117/12.875752

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