11 February 2011 Lateral spread of MEMS WDM technologies
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Proceedings Volume 7930, MOEMS and Miniaturized Systems X; 793003 (2011) https://doi.org/10.1117/12.882725
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States
Abstract
Optical MEMS technologies originally developed for the WDM systems have found a wide range of lateral spreading applications. For instance, we have constructed a novel power-over-fiber type OCT endoscope by using two different wavelengths for powering an electrostatic MEMS scanner and for optical probing; this work is on the extension of a MEMS variable optical attenuator. Another example is a Fabry-Perot interferometer for wavelength filtering that has been redirected to a new use of a tunable color pixel developed in a plastic sheet of large area. We look into the diverging potential of MEMS in micro optics.
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Hiroshi Toshiyoshi, "Lateral spread of MEMS WDM technologies", Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 793003 (11 February 2011); doi: 10.1117/12.882725; https://doi.org/10.1117/12.882725
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