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14 February 2011 An improved focus control mirror using SU-8 wafer bonding process
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Proceedings Volume 7930, MOEMS and Miniaturized Systems X; 793005 (2011) https://doi.org/10.1117/12.876672
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States
Abstract
We are developing MEMS deformable mirrors for focus control in miniature optical systems, including endoscopic microscopes and small form-factor camera lenses. This paper describes a new process to create mirrors made from the photoset polymer SU-8. The SU-8 also serves as the adhesive layer for wafer bonding, resulting in a simple, low cost fabrication process. The paper describes the process details and the optical properties of the resulting focus control mirrors, which have a diameter of 2 mm, a stroke in excess of 8 μm and very low residual aberration. Multiple actuation electrodes allow control of more than 0.4 μm peak-peak of spherical aberration.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mohammad J. Moghimi, B. Jeffery Lutzenberger, Kyle Oliver, Steven Gates, Xiaohu Xue, Brant Kaylor, and David L. Dickensheets "An improved focus control mirror using SU-8 wafer bonding process", Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 793005 (14 February 2011); https://doi.org/10.1117/12.876672
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