14 February 2011 Out-of-plane translatory MEMS actuator with extraordinary large stroke for optical path length modulation
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Proceedings Volume 7930, MOEMS and Miniaturized Systems X; 79300I (2011) https://doi.org/10.1117/12.879069
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States
Abstract
A translatory MOEMS actuator with extraordinary large stroke - especially developed for fast optical path length modulation in miniaturized FTIR-spectrometers - is presented. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1.2 mm is realized by means of a new suspension design of the comparative large mirror plate with 19.6 mm² aperture using four pantographs. The MOEMS device is driven electro - statically resonant and is manufactured in a CMOS compatible SOI process. Up to ± 600 μm amplitude (typically 1mm stroke) has been measured in vacuum of 30 Pa and 50 V driving voltage for an optimized pantograph design enabling reduced gas damping and higher driving efficiency.
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Thilo Sandner, Thilo Sandner, Thomas Grasshoff, Thomas Grasshoff, Harald Schenk, Harald Schenk, Andreas Kenda, Andreas Kenda, } "Out-of-plane translatory MEMS actuator with extraordinary large stroke for optical path length modulation", Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300I (14 February 2011); doi: 10.1117/12.879069; https://doi.org/10.1117/12.879069
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