14 February 2011 Tunable mid-infrared filter based on Fabry-Perot interferometer with two movable reflectors
Author Affiliations +
Proceedings Volume 7930, MOEMS and Miniaturized Systems X; 79300K (2011) https://doi.org/10.1117/12.875428
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States
Abstract
A tunable IR filter based on a Fabry-Perot interferometer with two movable reflectors is reported. The infrared filter can be tuned over a wavelength range from 8 μm to 11 μm with voltages lower than 63 V. The FWHM bandwidth is lower than 200 nm and the peak transmittance is larger than 70 %. Simulation and practical shock test, both showed that the device can withstand 1500 g, 0.5 ms shocks according to Mil-Std-883G, method 2002.4, test condition B. The new infrared filter measures 8.5 mm x 8.5 mm and is suitable for the integration in a TO-8 housing in combination with a broadband infrared detector. The design benefits from relatively low stiffness of the mirror suspensions, compensation of vibration and gravitation induced forces possibly influencing the central wavelength and much lower actuation voltages as a result. Both reflector carriers are movable and are actuated by electrostatic forces.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Marco Meinig, Steffen Kurth, Karla Hiller, Norbert Neumann, Martin Ebermann, Elvira Gittler, and Thomas Gessner "Tunable mid-infrared filter based on Fabry-Perot interferometer with two movable reflectors", Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300K (14 February 2011); doi: 10.1117/12.875428; https://doi.org/10.1117/12.875428
PROCEEDINGS
12 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT


Back to Top