Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors

Jan Grahmann; Thomas Graßhoff; Holger Conrad; Thilo Sandner; Harald Schenk

doi:10.1117/12.874979

14 February 2011 Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors

Jan Grahmann, Thomas Graßhoff, Holger Conrad, Thilo Sandner, Harald Schenk

Proceedings Volume 7930, MOEMS and Miniaturized Systems X; 79300V (2011) https://doi.org/10.1117/12.874979
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

We have been developing a piezoresistive position detection for scanning micro mirrors in order to combine high position resolution with the capability of monolithic integration. In comparison to our formerly published results, the sensor sensitivity was strongly enhanced by implanting a 1 μm thick p-doped layer of NA ≈ 10¹⁷ cm^-3 into the lowly p-doped SOI device layer of NA ≈ 10¹⁵ cm^-3. This sensitivity was even further improved by at least a factor of 3 by a novel sensor design, allowing to couple more mechanical stress into the sensor structure.

Citation Download Citation

Jan Grahmann, Thomas Graßhoff, Holger Conrad, Thilo Sandner, and Harald Schenk "Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors", Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300V (14 February 2011); https://doi.org/10.1117/12.874979

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available