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14 February 2011 Microfabricated mirrors for space applications
Dara Bayat, Caglar Ataman, Benedikt Guldimann, Sébastien Lani, Wilfried Noell, Nico de Rooij
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Proceedings Volume 7930, MOEMS and Miniaturized Systems X; 79300W (2011) https://doi.org/10.1117/12.875038
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States
Abstract
We report on the advances towards the design and fabrication of a system consisting of two 10mm mirrors, one actuated magnetically and the other electrostatically. The system will be used for beam steering. The maximum resonant frequencies and deflection angle of each of the actuators will be reviewed and compared.
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Dara Bayat, Caglar Ataman, Benedikt Guldimann, Sébastien Lani, Wilfried Noell, and Nico de Rooij "Microfabricated mirrors for space applications", Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300W (14 February 2011); https://doi.org/10.1117/12.875038
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KEYWORDS
Space mirrors
Mirrors
Microfabrication
Actuators
Beam steering
Current controlled current source
Microopto electromechanical systems
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