14 February 2011 Novel unimorph deformable mirror with monolithic tip-tilt functionality for solid state lasers
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Proceedings Volume 7931, MEMS Adaptive Optics V; 793107 (2011) https://doi.org/10.1117/12.873763
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States
Abstract
We present a new type of unimorph deformable mirror with monolithic tip-tilt functionality. The tip-tilt actuation is based on a spiral arm design. The mirror will be used in high-power laser resonators for real-time intracavity phase control. The additional tip-tilt correction with a stroke up to 6 μm simplifies the resonator alignment significantly. The mirror is optimized for a laser beam footprint of about 10 mm. We have modeled and optimized this mirror by finite element calculations and we will present design criteria and tradeoffs for this mirrors. The mirror is manufactured from a super-polished glass substrate with very low surface scattering and excellent dielectric coating.
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S. Verpoort, U. Wittrock, "Novel unimorph deformable mirror with monolithic tip-tilt functionality for solid state lasers", Proc. SPIE 7931, MEMS Adaptive Optics V, 793107 (14 February 2011); doi: 10.1117/12.873763; https://doi.org/10.1117/12.873763
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