Polymorphic optical zoom with MEMS DMs

Yang Lu; Samuel M. Hoffman; Christopher R. Stockbridge; Andrew P. LeGendre; Jason B. Stewart; Thomas G. Bifano

doi:10.1117/12.874207

14 February 2011 Polymorphic optical zoom with MEMS DMs

Yang Lu, Samuel M. Hoffman, Christopher R. Stockbridge, Andrew P. LeGendre, Jason B. Stewart, Thomas G. Bifano

Proceedings Volume 7931, MEMS Adaptive Optics V; 79310D (2011) https://doi.org/10.1117/12.874207
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

A prototype optical system for compact, high-speed zooming is described. The system is enabled by a pair of MEMS deformable mirrors (DMs), and is capable of high-speed optical zoom without translation of components. We describe experiments conducted with the zoom system integrated with an optical microscope, demonstrating 2.5× zoom capability. Zoom is achieved by simultaneously adjusting focal lengths of the two DMs, which are inserted between an infinity-corrected microscope objective and a tube lens. In addition to zoom, the test system is demonstrated to be capable of automated fine focus control and adaptive aberration compensation. Image quality is measured using contrast modulation, and performance of the system is quantified.

Citation Download Citation

Yang Lu, Samuel M. Hoffman, Christopher R. Stockbridge, Andrew P. LeGendre, Jason B. Stewart, and Thomas G. Bifano "Polymorphic optical zoom with MEMS DMs", Proc. SPIE 7931, MEMS Adaptive Optics V, 79310D (14 February 2011); https://doi.org/10.1117/12.874207

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