Hybrid Si-LiNbO3 micro-ring resonators for active microphotonic devices

Yoo Seung Lee; Gun-Duk Kim; Sang-Shin Lee; Wan-Gyu Lee; William H. Steier

doi:10.1117/12.873956

23 February 2011 Hybrid Si-LiNbO₃ micro-ring resonators for active microphotonic devices

Yoo Seung Lee, Gun-Duk Kim, Sang-Shin Lee, Wan-Gyu Lee, William H. Steier

Proceedings Volume 7934, Optical Components and Materials VIII; 79340I (2011) https://doi.org/10.1117/12.873956
Event: SPIE OPTO, 2011, San Francisco, California, United States

Abstract

A hybrid structure of Si-LiNbO₃ micro-ring resonator was fabricated. Free standing single crystal LiNbO₃ microplatelets (mm long and 1 um thick) were obtained from a bulk LiNbO₃ wafer by ion implantation and thermal shock. They were then transferred, positioned and bonded to Si micro-ring structure. In this hybrid structure, a large portion of the TM field is located above and below the Si waveguide. Then, the effective index of the Si waveguide can be changed by varying the refractive index of the LiNbO₃ cladding layer. Theoretical calculation with finite difference method proved that the ratio between effective index change of the Si waveguide and index change of LiNbO₃ cladding layer was 0.31 (Δn_Si/Δn_LNO=0.31) for TM mode. Then, calculated Δn_Si was about 1×10^-4 with 3 V. The effective r coefficient of Si and tuning sensitivity were about 7.2 pm/V and 2.55 GHz/V, respectively. These values are comparable to current active Si photonics with plasma dispersion methods. In addition, high speed modulation (over 40 GHz) is possible in this hybrid structure. This demonstration of a single crystalline LiNbO₃ acting as the upper cladding shows the possibility of integrating a very good EO and NLO material into the silicon-on-insulator photonics technology.

Citation Download Citation

Yoo Seung Lee, Gun-Duk Kim, Sang-Shin Lee, Wan-Gyu Lee, and William H. Steier "Hybrid Si-LiNbO₃ micro-ring resonators for active microphotonic devices", Proc. SPIE 7934, Optical Components and Materials VIII, 79340I (23 February 2011); https://doi.org/10.1117/12.873956

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