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17 January 2011 Optical spectra of two-dimensional photonic crystal bars based on macroporous Si
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Proceedings Volume 7943, Silicon Photonics VI; 79431I (2011) https://doi.org/10.1117/12.882369
Event: SPIE OPTO, 2011, San Francisco, California, United States
Abstract
Two-dimensional (2D) photonic crystal (PC) bars with 6 and 21 periods were fabricated by simultaneous photoelectrochemical etching of macropores and trenches in a pre-patterned silicon wafer. The structures had square lattice of cylindrical pores and were terminated by nonmodulated silicon pre-layers. The infrared reflection spectra of the PC bars have been simulated using scattering matrix method. In order to take into account the roughness of pore inner surface an additional silicon layer around the pores was introduced with a fitted complex refractive index. A comparison between the simulated refection spectra and those obtained experimentally demonstrates a satisfactory agreement in the region of secondary photonic band gaps.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sergey A. Dyakov, Ekaterina V. Astrova, Tatiana S. Perova, Vladimir A. Tolmachev, Galina V. Fedulova, Anna Baldycheva, Viktor Yu. Timoshenko, Sergei G. Tikhodeev, and Nikolay A. Gippius "Optical spectra of two-dimensional photonic crystal bars based on macroporous Si", Proc. SPIE 7943, Silicon Photonics VI, 79431I (17 January 2011); https://doi.org/10.1117/12.882369
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