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17 January 2011 Low-power thermal tuning of SOI-CMOS photonic structures
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Abstract
Ring waveguide resonating structures with high quality factors are the key components servicing silicon photonic links. We demonstrate highly efficient spectral tunability of the microphotonic ring structures manufactured in commercial 130 nm SOI CMOS technology. Our rings are fitted with dedicated heaters and integrated with silicon micro-machined features. Optimized layout and structure of the devices result in their maximized thermal impedance and increased efficiency of the thermal tuning.
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Ivan Shubin, Xuezhe Zheng, Guoliang Li, Hiren Thacker, Jin Yao, Bruce Guenin, Thierry Pinguet, Attila Mekis, A. V. Krishnamoorthy, and J. E. Cunningham "Low-power thermal tuning of SOI-CMOS photonic structures", Proc. SPIE 7944, Optoelectronic Interconnects and Component Integration XI, 794402 (17 January 2011); https://doi.org/10.1117/12.876428
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