Paper
7 February 2011 New high speed VCSEL product development at Emcore
Chuan Xie, Neinyi Li, Chun Lei, Xinyu Sun, Wenlin Luo, Livia Zhao, Chris Helms, Chiyu Liu, Dan Jessen, Rich Carson
Author Affiliations +
Abstract
In this paper, we summarize the recent VCSEL development effort at Emcore. The focus of this effort is on performance, reliability and manufacturability. We will report the performance of Emcore's 14Gbps VCSEL for the new fibre channel application. We will also present the work on manufacturing both singlet and various VCSEL arrays, with performance up to 10Gbps, using a universal mask set to deliver both high performance and high manufacturability. The reliability data and the work on wafer level burn-in will be updated as well.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chuan Xie, Neinyi Li, Chun Lei, Xinyu Sun, Wenlin Luo, Livia Zhao, Chris Helms, Chiyu Liu, Dan Jessen, and Rich Carson "New high speed VCSEL product development at Emcore", Proc. SPIE 7952, Vertical-Cavity Surface-Emitting Lasers XV, 795206 (7 February 2011); https://doi.org/10.1117/12.879027
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Cited by 7 scholarly publications.
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KEYWORDS
Vertical cavity surface emitting lasers

Eye

Semiconducting wafers

Photomasks

Bismuth

Capacitance

Manufacturing

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