16 March 2011 12-inch-wafer-scale CMOS active-pixel sensor for digital mammography
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Abstract
This paper describes the development of an active-pixel sensor (APS) panel, which has a field-of-view of 23.1×17.1 cm and features 70-μm-sized pixels arranged in a 3300×2442 array format, for digital mammographic applications. The APS panel was realized on 12-inch wafers based on the standard complementary metal-oxide-semiconductor (CMOS) technology without physical tiling processes of several small-area sensor arrays. Electrical performance of the developed panel is described in terms of dark current, full-well capacity and leakage current map. For mammographic imaging, the optimized CsI:Tl scintillator is experimentally determined by being combined with the developed panel and analyzing im aging characteristics, such as modulation-transfer function, noise-power spectrum, detective quantum efficiency, image l ag, and contrast-detail analysis by using the CDMAM 3.4 phantom. With these results, we suggest that the developed CMOS-based detector can be used for conventional and advanced digital mammographic applications.
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Sung Kyn Heo, Sung Kyn Heo, Jari Kosonen, Jari Kosonen, Sung Ha Hwang, Sung Ha Hwang, Tae Woo Kim, Tae Woo Kim, Seungman Yun, Seungman Yun, Ho Kyung Kim, Ho Kyung Kim, } "12-inch-wafer-scale CMOS active-pixel sensor for digital mammography", Proc. SPIE 7961, Medical Imaging 2011: Physics of Medical Imaging, 79610O (16 March 2011); doi: 10.1117/12.878053; https://doi.org/10.1117/12.878053
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