16 March 2011 Design and fabrication of single grain TFTs and lateral photodiodes for low dose x-ray detection
Author Affiliations +
Design, fabrication and measurement results of single grain (SG) lateral PIN photodiodes and SG thin film transistors (TFT) are reported in this paper. Devices were developed to be used in indirect X-ray image sensor pixel design. We have controlled position of 6 μm x 6 μm silicon grains with excimer-laser crystallization of a-Si film. Lateral PIN photodiode (PD) arrays were designed inside the single grain with 1 μm, 1.5 μm and 2 μm intrinsic region length and 4 μm width. The gate length and the width of the fabricated TFTs are 1.5 μm and 4 μm, respectively. Devices were fabricated using a-Si, SOI and crystalline silicon layers and electrical measurement results were compared. 100 μm x 100 μm sizes SG-photodiodes have dark and saturation currents on the order of 0.1 nA and 10 nA resulting in a light sensitivity of 200 with an exposure of white light. Fabricated NMOS and PMOS TFTs inside the grains have field effect mobility of 526 cm2/Vs and 253 cm2/Vs, respectively.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Arslan, R. Ishihara, J. Derakhshandeh, C. I. M. Beenakker, "Design and fabrication of single grain TFTs and lateral photodiodes for low dose x-ray detection", Proc. SPIE 7961, Medical Imaging 2011: Physics of Medical Imaging, 79614N (16 March 2011); doi: 10.1117/12.877959; https://doi.org/10.1117/12.877959


MTF and NPS of single-shot dual-energy sandwich detectors
Proceedings of SPIE (March 30 2016)
Silicon drift chamber with extended energy range
Proceedings of SPIE (December 13 2000)
Development of new x-ray still-image detector 'XTV-PROM'
Proceedings of SPIE (February 03 1993)
X VIEW a high resolution real time solid state...
Proceedings of SPIE (January 10 2003)
Digital Radiology With A Slit Scan Detector
Proceedings of SPIE (May 01 1989)
Application of a charge coupled device as an x ray...
Proceedings of SPIE (February 15 1994)

Back to Top