5 April 2011 AIMS EUV: the actinic aerial image review platform for EUV masks
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Abstract
EUV mask infrastructure is of key importance for the introduction of the 13.5nm extreme ultraviolet (EUV) wavelength into volume production. In particular, the manufacturing of defect free masks is essential and requires a printability analysis ("review") of potential defect sites. For this purpose, Carl Zeiss and the SEMATECH EUVL Mask Infrastructure consortium have performed a concept and feasibility study for an actinic aerial image metrology system (AIMS™). In this paper, we discuss the main results of this study. We explain the system concept, discuss the expected performance and show simulations of the capability to find minimum sized defects. We demonstrate that our EUV AIMS concept is technically feasible and supports the defect review requirements for the 22nm and 16nm half-pitch (hp) node.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dirk Hellweg, Dirk Hellweg, Johannes Ruoff, Johannes Ruoff, Alois Herkommer, Alois Herkommer, Joachim Stühler, Joachim Stühler, Thomas Ihl, Thomas Ihl, Heiko Feldmann, Heiko Feldmann, Michael Ringel, Michael Ringel, Ulrich Strößner, Ulrich Strößner, Sascha Perlitz, Sascha Perlitz, Wolfgang Harnisch, Wolfgang Harnisch, } "AIMS EUV: the actinic aerial image review platform for EUV masks", Proc. SPIE 7969, Extreme Ultraviolet (EUV) Lithography II, 79690H (5 April 2011); doi: 10.1117/12.879422; https://doi.org/10.1117/12.879422
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