Influence of environments on the footprint of particle contamination on EUV mask

Tae-Gon Kim; Els Kesters; Herbert Struyf; Paul W. Mertens; Stefan De Gendt; Marc Heyns

doi:10.1117/12.881608

29 March 2011 Influence of environments on the footprint of particle contamination on EUV mask

Tae-Gon Kim, Els Kesters, Herbert Struyf, Paul W. Mertens, Stefan De Gendt, Marc Heyns

Proceedings Volume 7969, Extreme Ultraviolet (EUV) Lithography II; 79690L (2011) https://doi.org/10.1117/12.881608
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

Even if particles are removed still a residue or "footprint" is left behind. Such a footprint may in itself be large enough to become a printable defect. Footprint of silica and PSL particles with diameters of 100 nm which were deposited on Si surface and were stored at different environments was measured by atomic force microscope. Their particle removal forces also were measured. Footprint of silica and PSL particles and their particle removal forces represented that silica particles as an inorganic type particle were very sensitive humidity and it needs high removal force when the silica particle aged at higher humidity level and longer storage time. On the other hand, PSL particles as an organic type particle were not sensitive humidity, but footprints were observed even at low humidity condition and short storage time. This study could help to improve the understanding of particle adhesion on EUV mask and might help to improve mask life time longer.

Citation Download Citation

Tae-Gon Kim, Els Kesters, Herbert Struyf, Paul W. Mertens, Stefan De Gendt, and Marc Heyns "Influence of environments on the footprint of particle contamination on EUV mask", Proc. SPIE 7969, Extreme Ultraviolet (EUV) Lithography II, 79690L (29 March 2011); https://doi.org/10.1117/12.881608

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available