Broadband spectrophotometry on nonplanar EUV multilayer optics

I. Balasa; H. Blaschke; D. Ristau

doi:10.1117/12.881577

8 April 2011 Broadband spectrophotometry on nonplanar EUV multilayer optics

I. Balasa, H. Blaschke, D. Ristau

Proceedings Volume 7969, Extreme Ultraviolet (EUV) Lithography II; 796928 (2011) https://doi.org/10.1117/12.881577
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

A reliable and compact EUV-spectrometer adapted for the broadband analysis of curved EUV-optics for near normal incidence applications will be presented. Using a specific design for the specimen holder, the limits of both types of samples, convex and concave, can be verified. The capability of the device is confirmed by investigations in the spectral reflectivity of a single EUV-multilayer mirror deposited on a silicon wafer. Its radius of curvature (ROC) is continuously adjustable, providing a direct comparison of the detected peak reflectivity, peak location and spectral bandwidth in dependence on its curvature. The range of curvature applied is in compliance with optics specifications of current projection systems for EUV-lithography.

Citation Download Citation

I. Balasa, H. Blaschke, and D. Ristau "Broadband spectrophotometry on nonplanar EUV multilayer optics", Proc. SPIE 7969, Extreme Ultraviolet (EUV) Lithography II, 796928 (8 April 2011); https://doi.org/10.1117/12.881577

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available