8 April 2011 Understanding the behavior of laser-produced tin plasma by time-resolved spectroscopy and simulations of their spectra
Author Affiliations +
Abstract
Extreme ultraviolet (EUV) spectra from laser-produced tin plasmas have been recorded as a function of time using an ISAN grazing incidence spectrograph to study the temporal evolution of the tin unresolved transition array (UTA) responsible for the peak EUV emission. This paper reports the experimental as well as simulated results for a 10 ns gate width with 2 ns time steps which confirm that the development and collapse of the UTA follow the temporal behavior of the laser pulse. The self-absorption features at longer wavelengths are observed particularly during plasma cooling and arise from lower ion stages ranging from Sn VI to Sn XI.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
I. Kambali, I. Kambali, T. McCormack, T. McCormack, E. Scally, E. Scally, J. White, J. White, F. O'Reilly, F. O'Reilly, P. Sheridan, P. Sheridan, G. D. O'Sullivan, G. D. O'Sullivan, } "Understanding the behavior of laser-produced tin plasma by time-resolved spectroscopy and simulations of their spectra", Proc. SPIE 7969, Extreme Ultraviolet (EUV) Lithography II, 79692P (8 April 2011); doi: 10.1117/12.878869; https://doi.org/10.1117/12.878869
PROCEEDINGS
8 PAGES


SHARE
Back to Top