8 April 2011 Development of debris-mitigation tool for HVM DPP source
Author Affiliations +
Abstract
Debris-mitigation tools (DMTs) have been used in DPP sources and the performance has been well proven in alpha sources. In beta and HVM sources, requirement to the DMT is increasing to fulfill the power and lifetime requirements simultaneously. In order to bring DPP technology into HVM level, a high-performance DMT has been developed. It has high mitigation performance for both neutral and ionic debris, large collection angle of the collector having high optical transmission, and withstand large thermal input from the discharge source head. Experiments were carried out using mirror samples and proved sufficient performance with which no sputtering and deposition were observed.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hironobu Yabuta, Hironobu Yabuta, Shinsuke Mori, Shinsuke Mori, Takahiro Inoue, Takahiro Inoue, Yusuke Teramoto, Yusuke Teramoto, Hiroto Sato, Hiroto Sato, Kazuaki Hotta, Kazuaki Hotta, } "Development of debris-mitigation tool for HVM DPP source", Proc. SPIE 7969, Extreme Ultraviolet (EUV) Lithography II, 79692U (8 April 2011); doi: 10.1117/12.879471; https://doi.org/10.1117/12.879471
PROCEEDINGS
6 PAGES


SHARE
Back to Top