Modeling Of Energy And Mass Transport In Laser-Assisted CVD I: Surface Morphology

D. C. Skouby; K. F. Jensen

doi:10.1117/12.941036

22 April 1987 Modeling Of Energy And Mass Transport In Laser-Assisted CVD I: Surface Morphology

D. C. Skouby, K. F. Jensen

Proceedings Volume 0797, Advanced Processing of Semiconductor Devices; (1987) https://doi.org/10.1117/12.941036
Event: Advances in Semiconductors and Semiconductor Structures, 1987, Bay Point, FL, United States

Abstract

The chemical vapor deposition of metals induced by continuous laser irradiation of a substrate is modeled. The transient heat conduction problem is solved in the solid substrate, while the gas phase heat and mass transfer processes are assumed to be in a quasi-steady state. Temperature dependent parameters are used and irregularly shaped deposits are considered. Volcano-like deposition profiles are found to occur under certain conditions of gas pressure and laser intensity. The model predictions show that depletion effects and adsorption-desorption phenomena are major factors in the occurrence of volcano-like deposits.

Citation Download Citation

D. C. Skouby and K. F. Jensen "Modeling Of Energy And Mass Transport In Laser-Assisted CVD I: Surface Morphology", Proc. SPIE 0797, Advanced Processing of Semiconductor Devices, (22 April 1987); https://doi.org/10.1117/12.941036

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