Investigation on accuracy of process overlay measurement

Chan Hwang; Jeongjin Lee; Seungyoon Lee; Jeongho Yeo; Yeonghee Kim; Hongmeng Lim; Dongsub Choi

doi:10.1117/12.880299

20 April 2011 Investigation on accuracy of process overlay measurement

Chan Hwang, Jeongjin Lee, Seungyoon Lee, Jeongho Yeo, Yeonghee Kim, Hongmeng Lim, Dongsub Choi

Proceedings Volume 7971, Metrology, Inspection, and Process Control for Microlithography XXV; 79711F (2011) https://doi.org/10.1117/12.880299
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

The shrinkage of design rule necessitated corresponding tighter overlay control. However, in advanced applications, the extension of current technology may not be able to meet the control requirement, consequently, additional breakthroughs are required. In this study, we investigated methods to enhance the overlay control, approaches by extraction of real overlay error out of overlay measurement. So far, only the destructive inspections like vertical SEM have enabled us to measure real misalignment. But, a concept of non-destructive method is proposed in this paper, extracting vertical information from the results of multiple measurements with various measurement conditions, keys or recipes. With this proposed method, the measurement accuracy can be improved and we can enable a new knob for overlay control.

Citation Download Citation

Chan Hwang, Jeongjin Lee, Seungyoon Lee, Jeongho Yeo, Yeonghee Kim, Hongmeng Lim, and Dongsub Choi "Investigation on accuracy of process overlay measurement", Proc. SPIE 7971, Metrology, Inspection, and Process Control for Microlithography XXV, 79711F (20 April 2011); https://doi.org/10.1117/12.880299

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available