20 April 2011 3D features measurement using YieldStar, an angle resolved polarized scatterometer
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Metrology on 3D features like contact holes (CH) is more challenging than on lines and spaces (L/S) structures especially if one wants to have profile information. Scatterometry has been widely used on L/S structures and has enabled characterization of lithographic features providing with critical dimensions (CD) as well as feature height and side wall angle. In this paper, we will present the application of scatterometry to the measurement of 3D structures using an angle resolved polarized scatterometer: ASML YieldStar S-100. Contact hole measurements will be presented and correlation to standard metrology tools will be shown. Measurement capability will be discussed in terms of reproducibility, calculation time, sensitivity of the parameters of interest and correlation between them leading to a proper model choice. Finally initial results on more complex 3D features (line ends, brick walls,...) will be presented.
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Anne-Laure Charley, Anne-Laure Charley, Philippe Leray, Philippe Leray, Koen D'havé, Koen D'havé, Shaunee Cheng, Shaunee Cheng, Paul Hinnen, Paul Hinnen, Fahong Li, Fahong Li, Peter Vanoppen, Peter Vanoppen, Mircea Dusa, Mircea Dusa, "3D features measurement using YieldStar, an angle resolved polarized scatterometer", Proc. SPIE 7971, Metrology, Inspection, and Process Control for Microlithography XXV, 79712E (20 April 2011); doi: 10.1117/12.881276; https://doi.org/10.1117/12.881276

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