15 April 2011 Characteristics of main chain decomposable STAR polymer for EUV resist
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Abstract
The concept of nonlinear acid diffusion coefficient would be emphasized to achieve better latent image quality, resulting in better lithographic performance. Focusing on realizing the concept, we previously reported about a main chain decomposable star shaped polymer (STAR polymer).STAR polymer consists of a core unit and several arm units which connect to the core unit with easily acid cleavable bonding. (Fig.1) The main chain decomposition system is ideal to achieve promoted acid diffusion at exposed area because it accompanies great molecular weight reduction at exposed area. The significance of the STAR system had been confirmed for partially protected poly(p-hydroxystyrene) (PHS) considering arm length and core structure. Employing p-hydroxy-α-methylstylene (PHOMS) for arm structure, novel STAR polymer with appropriate glass transition temperature (Tg) could be realized. (Fig.2) Poly PHOMS is known to undergo acid-catalyzed decomposition from the polymer end. Lithographic performance comparison between the STAR polymer and the linear polymer as a control using a Micro Exposure Tool (MET) would be exhibited. Thermal property change with exposure and dissolution charactersitic will be also discussed. Moreover main chain decomposition mechanism was investigated with flood EB irradiation.
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Jun Iwashita, Jun Iwashita, Taku Hirayama, Taku Hirayama, Isamu Takagi, Isamu Takagi, Kensuke Matsuzawa, Kensuke Matsuzawa, Kenta Suzuki, Kenta Suzuki, Sachiko Yoshizawa, Sachiko Yoshizawa, Kenri Konno, Kenri Konno, Masahito Yahagi, Masahito Yahagi, Kazufumi Sato, Kazufumi Sato, Seiichi Tagawa, Seiichi Tagawa, Kazuyuki Enomoto, Kazuyuki Enomoto, Akihiro Oshima, Akihiro Oshima, } "Characteristics of main chain decomposable STAR polymer for EUV resist", Proc. SPIE 7972, Advances in Resist Materials and Processing Technology XXVIII, 79720L (15 April 2011); doi: 10.1117/12.879349; https://doi.org/10.1117/12.879349
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