15 April 2011 Development of new Si-contained hardmask for tri-layer process
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Abstract
In the advanced semiconductor lithography process, the tri-layer process have been used for the essential technique{photoresist/ silicon contained hard mask (Si-HM) / spin on carbon hard mask (SOC)}(Figure 1). Tri-layer process was introduced and applied to the L/S and C/H patterning in the ArF dry and ArF immersion lithography process. Therefore, Si-HM should have the wider compatibility with different photoresist. In this paper, we investigate the interface behavior between photoresist and Si-HM in detail and get the new Si-HM to have the wider compatibility with different photoresist.
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Makoto Nakajima, Makoto Nakajima, Yuta Kanno, Yuta Kanno, Wataru Shibayama, Wataru Shibayama, Satoshi Takeda, Satoshi Takeda, Masakazu Kato, Masakazu Kato, Takashi Matsumoto, Takashi Matsumoto, } "Development of new Si-contained hardmask for tri-layer process", Proc. SPIE 7972, Advances in Resist Materials and Processing Technology XXVIII, 797225 (15 April 2011); doi: 10.1117/12.879357; https://doi.org/10.1117/12.879357
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