Negative photo-imageable spin-on dielectrics: report on progress, challenges, and opportunities

Ruzhi M. Zhang; Chien-Hsien S. Lee; Elizabeth Wolfer; Tatsuro Nagahara; Mark Neisser; Ralph R. Dammel

doi:10.1117/12.871114

15 April 2011 Negative photo-imageable spin-on dielectrics: report on progress, challenges, and opportunities

Ruzhi M. Zhang, Chien-Hsien S. Lee, Elizabeth Wolfer, Tatsuro Nagahara, Mark Neisser, Ralph R. Dammel

Proceedings Volume 7972, Advances in Resist Materials and Processing Technology XXVIII; 79722K (2011) https://doi.org/10.1117/12.871114
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

From the perspectives of IC fabrication simplification, cost reduction, and waste material cutback, it is highly desirable to combine the traditional pattern formation step (lithographical processes) and the pattern transfer step (etch processes) into a single step. Photo-imageable spin-on dielectrics (PSOD) render it possible to achieve the aforementioned goal. However, the bestowed dual functionalities on PSOD put great challenges on the material design and development. PSOD needs not only to match all the performances of the advanced resists, but also to undertake all the duties of the dielectrics on the chips. We wish to report our modular approach employing Si-containing materials to address the challenge and to meet the requirements from the different material roles. This paper will also discuss the investigation and progress on lithographic performance, cure behaviors, thermal stability, and electrical and mechanical properties.

Citation Download Citation

Ruzhi M. Zhang, Chien-Hsien S. Lee, Elizabeth Wolfer, Tatsuro Nagahara, Mark Neisser, and Ralph R. Dammel "Negative photo-imageable spin-on dielectrics: report on progress, challenges, and opportunities", Proc. SPIE 7972, Advances in Resist Materials and Processing Technology XXVIII, 79722K (15 April 2011); https://doi.org/10.1117/12.871114

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available