Fast algorithm for quadratic aberration model based on cross triple correlation

Wei Liu; Tingting Zhou; Shiyuan Liu

doi:10.1117/12.879217

22 March 2011 Fast algorithm for quadratic aberration model based on cross triple correlation

Wei Liu, Tingting Zhou, Shiyuan Liu

Proceedings Volume 7973, Optical Microlithography XXIV; 79731M (2011) https://doi.org/10.1117/12.879217
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

The quadratic aberration model used in optical lithography is a natural extension of the linear model by taking into account interactions among individual Zernike coefficients. Although the model has been tested and verified in many applications, the effects of Zernike coefficients under partially coherent imaging are usually obtained by extensive experiments due to complexity of the model expression. In this paper, a generalized cross triple correlation (CTC) is introduced, and a fast algorithm to simulate the quadratic aberration model is developed. Simulations were performed by the proposed CTC based algorithm with different input Zernike aberrations for binary and phase shift masks with multiple pitches and orientations, which demonstrate that the proposed approach is not only accurate but also efficient for revealing the influence of different Zernike orders on aerial image intensity distributions under partially coherent illumination.

Citation Download Citation

Wei Liu, Tingting Zhou, and Shiyuan Liu "Fast algorithm for quadratic aberration model based on cross triple correlation", Proc. SPIE 7973, Optical Microlithography XXIV, 79731M (22 March 2011); https://doi.org/10.1117/12.879217

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available