28 April 2011 Microfibrous metallic cloth for acoustic isolation of a MEMS gyroscope
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Abstract
The response of a MEMS device that is exposed to a harsh environment may range from an increased noise floor to a completely erroneous output to temporary or even permanent device failure. One such harsh environment is high power acoustic energy possessing high frequency components. This type of environment sometimes occurs in small aerospace vehicles. In this type of operating environment, high frequency acoustic energy can be transferred to a MEMS gyroscope die through the device packaging. If the acoustic noise possesses a sufficiently strong component at the resonant frequency of the gyroscope, it will overexcite the motion of the proof mass, resulting in the deleterious effect of corrupted angular rate measurement. Therefore if the device or system packaging can be improved to sufficiently isolate the gyroscope die from environmental acoustic energy, the sensor may find new applications in this type of harsh environment. This research effort explored the use of microfibrous metallic cloth for isolating the gyroscope die from environmental acoustic excitation. Microfibrous cloth is a composite of fused, intermingled metal fibers and has a variety of typical uses involving chemical processing applications and filtering. Specifically, this research consisted of experimental evaluations of multiple layers of packed microfibrous cloth composed of sintered nickel material. The packed cloth was used to provide acoustic isolation for a test MEMS gyroscope, the Analog Devices ADXRS300. The results of this investigation revealed that the intermingling of the various fibers of the metallic cloth provided a significant contact area between the fiber strands and voids, which enhanced the acoustic damping of the material. As a result, the nickel cloth was discovered to be an effective acoustic isolation material for this particular MEMS gyroscope.
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Robert Dean, Nesha Burch, Meagan Black, Aubrey Beal, George Flowers, "Microfibrous metallic cloth for acoustic isolation of a MEMS gyroscope", Proc. SPIE 7979, Industrial and Commercial Applications of Smart Structures Technologies 2011, 797909 (28 April 2011); doi: 10.1117/12.880624; https://doi.org/10.1117/12.880624
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KEYWORDS
Gyroscopes

Acoustics

Microelectromechanical systems

Aluminum

Nickel

Packaging

Metals

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