InP lateral overgrowth technology for silicon photonics

Zhechao Wang; Carl Junesand; Wondwosen Metaferia; Chen Hu; Sebastian Lourdudoss; Lech Wosinski

doi:10.1117/12.887973

7 January 2011 InP lateral overgrowth technology for silicon photonics

Zhechao Wang; Carl Junesand; Wondwosen Metaferia; Chen Hu; Sebastian Lourdudoss; Lech Wosinski

Author Affiliations +

Proceedings Volume 7987, Optoelectronic Materials and Devices V; 798706 (2011) https://doi.org/10.1117/12.887973
Event: Asia Communications and Photonics Conference and Exhibition, 2010, Shanghai, Shanghai, China

Abstract

Epitaxial Lateral Overgrowth has been proposed as a key technology of a novel hybrid integration platform for active silicon photonic components. By fabricating silicon oxide mask on top of a thin InP seed layer, we can use the so called defect necking effect to filter out the threading dislocations propagating from the seed layer. By optimizing the process, thin dislocation free InP layers have been successfully obtained on top of silicon wafer. The obtained characterization results show that the grown InP layer has very high quality, which can be used as the base for further process of active photonic components on top of silicon.

Citation Download Citation

Zhechao Wang, Zhechao Wang, Carl Junesand, Carl Junesand, Wondwosen Metaferia, Wondwosen Metaferia, Chen Hu, Chen Hu, Sebastian Lourdudoss, Sebastian Lourdudoss, Lech Wosinski, Lech Wosinski, } "InP lateral overgrowth technology for silicon photonics", Proc. SPIE 7987, Optoelectronic Materials and Devices V, 798706 (7 January 2011); doi: 10.1117/12.887973; https://doi.org/10.1117/12.887973

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years