Laser inspection for surface acoustic wave performance in SAW device

Jun Oh Park; Won Kweon Jang

doi:10.1117/12.888685

3 January 2011 Laser inspection for surface acoustic wave performance in SAW device

Jun Oh Park, Won Kweon Jang

Proceedings Volume 7990, Optical Sensors and Biophotonics II; 79900E (2011) https://doi.org/10.1117/12.888685
Event: Asia Communications and Photonics Conference and Exhibition, 2010, Shanghai, Shanghai, China

Abstract

We suggested a laser inspection method of interference and diffraction for checking if any defect in a RF device such as SAW filter and delay line. The real time optical metrology that we proposed can provide a visualized positional vibration, unlike the electric method that is capable of checking only product defect. It can substitute a conventional test method of electrical with finding out where the vibration is weak or disturbed by other service frequency module. The measuring limits with a single-mode laser source are also given and what measuring conditions should be satisfied for detecting a fine displacement or vibration like propagation of a surface acoustic wave in RF device. The interference and diffraction due to RF signal are analyzed by an optical interpretation. In this paper, a single mode laser and a 105MHz-center- frequency repeater filter were employed for experiments and theoretical analysis. The optical metrology providing visual energy distribution and real time inspection for surface acoustic wave is proposed for development of high quality multi-service and multi-frequency RF module.

Citation Download Citation

Jun Oh Park and Won Kweon Jang "Laser inspection for surface acoustic wave performance in SAW device", Proc. SPIE 7990, Optical Sensors and Biophotonics II, 79900E (3 January 2011); https://doi.org/10.1117/12.888685

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available