Air-annealing effects on SiO2/ITO coating

Yiqin Ji; Deying Chen; Weihao Li; Bingjun Wu; Jie Zong; Dandan Liu; Yanmin Zhang

doi:10.1117/12.888408

17 February 2011 Air-annealing effects on SiO₂/ITO coating

Yiqin Ji, Deying Chen, Weihao Li, Bingjun Wu, Jie Zong, Dandan Liu, Yanmin Zhang

Proceedings Volume 7995, Seventh International Conference on Thin Film Physics and Applications; 799502 (2011) https://doi.org/10.1117/12.888408
Event: Seventh International Conference on Thin Film Physics and Applications, 2010, Shanghai, China

Abstract

Indium tin oxide (ITO) thin film with SiO₂ protective upper layer prepared by electron beam evaporation was annealed in air up to 300°C. Evolution of transmittance, resistance and surface morphology of this SiO₂/ITO coating was studied. Transmittance in visible and near-infrared range both increased while absorption edge exhibited red shift after annealing. Resistance increased monotonously with rising annealing temperature, yet increments became smaller at temperatures above 270°C. Micron-defects were observed on the surface of SiO₂/ITO coating after annealing. Enhancement of crystallinity of ITO layer at high temperatures was thought to be responsible for these morphology and resistance evolutions.

Citation Download Citation

Yiqin Ji, Deying Chen, Weihao Li, Bingjun Wu, Jie Zong, Dandan Liu, and Yanmin Zhang "Air-annealing effects on SiO₂/ITO coating", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 799502 (17 February 2011); https://doi.org/10.1117/12.888408

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