Effects of sputter power, gas pressure and substrate temperature on the structure and optical properties of CdS thin films

Weiming Gong; Run Xu; Jian Huang; Minyan Tang; Lin-jun Wang; Meng Cao

doi:10.1117/12.888273

18 February 2011 1Effects of sputter power, gas pressure and substrate temperature on the structure and optical properties of CdS thin films

Weiming Gong, Run Xu, Jian Huang, Minyan Tang, Lin-jun Wang, Meng Cao

Author Affiliations +

Proceedings Volume 7995, Seventh International Conference on Thin Film Physics and Applications; 79952C (2011) https://doi.org/10.1117/12.888273
Event: Seventh International Conference on Thin Film Physics and Applications, 2010, Shanghai, China

Abstract

CdS is deposited on transparent conductive oxide (TCO)-coated glass substrate by radio frequency (r.f.) magnetron sputtering method. The X-ray diffraction (XRD) measurements revealed that CdS films were polycrystalline with the hexagonal wurtzite structure present only. The same conclusions as described below are arrived at from the photoluminescence (PL) and UV-vis absorption spectra measurements. When the power increases or the gas pressure decreases, the grain size and the film thickness increases, and then lead to the increase of stress in films which results in the decrease of energy band gap. The substrate temperature also has an effect on the strain in the films.

Citation Download Citation

Weiming Gong, Run Xu, Jian Huang, Minyan Tang, Lin-jun Wang, and Meng Cao "1Effects of sputter power, gas pressure and substrate temperature on the structure and optical properties of CdS thin films", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79952C (18 February 2011); https://doi.org/10.1117/12.888273

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