28 February 2011 Time-of-flight characterization of ZnO laser-generated plasma
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Proceedings Volume 7996, Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2010; 79960W (2011) https://doi.org/10.1117/12.888781
Event: Fundamentals of Laser Assisted Micro- and Nanotechnologies 2010, 2010, St. Petersburg, Russian Federation
A study of the laser ablation of a ZnO target has been carried out in vacuum, by using a Nd:Yag laser with a pulse duration of 3 ns, a wavelength of 532 nm and a maximum pulse energy of 150 mJ. The measurements of ablation yields, crater profiles and fast CCD plasma imaging allowed the evaluation of the plasma density. Time-of-flight (TOF) measurements have been also utilized to monitor the ion emission by using a special ion collector placed along the normal to the target surface. Coulomb-Boltzmann-shifted ion energy distributions have been obtained depending on the ions charge states. The plasma temperature was evaluated by such ion energy distributions of the experimental data. A special attention has been devoted to the ion acceleration processes due to the high electric fields generated inside the non-equilibrium plasma. The characterization of the latter and the deposition of ZnO thin films are correlated and discussed.
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A. M. Mezzasalma, A. M. Mezzasalma, G. Mondio, G. Mondio, L. Torrisi, L. Torrisi, F. Caridi, F. Caridi, "Time-of-flight characterization of ZnO laser-generated plasma", Proc. SPIE 7996, Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2010, 79960W (28 February 2011); doi: 10.1117/12.888781; https://doi.org/10.1117/12.888781

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