12 July 2011 Nano-level 3D shape measurement system using color analysis method of RGB interference fringes
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Proceedings Volume 8000, Tenth International Conference on Quality Control by Artificial Vision; 800008 (2011); doi: 10.1117/12.890153
Event: 10th International Conference on Quality Control by Artificial Vision, 2011, Saint-Etienne, France
Abstract
Nano-level 3-D measurement is one of the key technologies for the current and future generation of production systems for semi-conductors, LCDs and nano-devices. To meet with these applications, wide range nano-level 3-D shape measurement method using combination of RGB laser lights has been developed. It measures the height of nano-objects from the combination of RGB LED lights interference. To analyze the combination of RGB lights, the color analysis method on xy-color plane has been introduced. In this method, the color changes on xy-color plane means the height changes. Experimental system to measure the three micro-meter height has been developed, and succeeded to measure the 50 nm step and 1000 nm step samples. The method has been applied to measure a nano-device, a contact needle for measurement. The shape of the needle has been extracted, successfully.
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Sheiji Hata, Daichi Kimura, Masanobu Kaneda, Shigeaki Morimoto, Hiroaki Kobayashi, "Nano-level 3D shape measurement system using color analysis method of RGB interference fringes", Proc. SPIE 8000, Tenth International Conference on Quality Control by Artificial Vision, 800008 (12 July 2011); doi: 10.1117/12.890153; https://doi.org/10.1117/12.890153
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KEYWORDS
RGB color model

3D metrology

Light sources and illumination

Phase shifts

Shape analysis

Mirrors

Laser development

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