26 July 2011 Fabrication of microlens arrays on soda-lima glasses with a Nd:YVO4laser
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Proceedings Volume 8001, International Conference on Applications of Optics and Photonics; 80010Q (2011) https://doi.org/10.1117/12.891809
Event: International Conference on Applications of Optics and Photonics, 2011, Braga, Portugal
Abstract
We present a laser direct-write technique that is capable of providing microlens arrays on soda-lime glass substrate from one step ablation process, permitting one to shorten the typical times of microlens fabrication with other direct-writing techniques. The technique is based on the combination of a Q-switched Nd:YVO4 laser and a galvanometer system for addressing the output beam laser. The geometrical and optical parameters of the microlenses have been measured to characterize the microlens arrays produced on an area of 2 mm×2 mm. Focal length values around 118 μm have been obtained by measuring the sag and the diameter of the microlens with a confocal microscope (nondirect method) or directly, using a microscope objective with a CCD camera. The practicality of both methods is shown in the good agreement between the obtained results for the focal length of microlenses. By using a noncontact profilometer, the surface roughness of the microlens has been measured and compared with that of a glass substrate.
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Daniel Nieto, Daniel Nieto, M. Teresa Flores-Arias, M. Teresa Flores-Arias, Gerard M. O'Connor, Gerard M. O'Connor, Carlos Gómez-Reino, Carlos Gómez-Reino, } "Fabrication of microlens arrays on soda-lima glasses with a Nd:YVO4laser", Proc. SPIE 8001, International Conference on Applications of Optics and Photonics, 80010Q (26 July 2011); doi: 10.1117/12.891809; https://doi.org/10.1117/12.891809
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