26 July 2011 Technology development towards a generic InP-based photonic-integration foundry
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Proceedings Volume 8001, International Conference on Applications of Optics and Photonics; 800111 (2011) https://doi.org/10.1117/12.892126
Event: International Conference on Applications of Optics and Photonics, 2011, Braga, Portugal
Abstract
The main goal of this work is to create a generic foundry service that allows outside users (i.e., universities and small- and-medium enterprises) that do not have fabrication facilities to obtain their own custom-made InP-based photonic-integrated chips (or ASPIC, application-specific photonic-integrated circuits, similar to ASIC in electronics). In this approach, the foundry supplies the user with the cross-section of the interconnect waveguide structure, and the mask layout dimensions and performance of several pre-defined- and wellcharacterized building blocks (BB) such as photodiodes, phase modulators, and spot-size converters (for lowloss fiber-chip coupling). Using this information, the user can generate a mask layout for the foundry by placing the building blocks onto his layout canvas and interconnecting them with the interconnect waveguides. Furthermore, since the material cross-section of the interconnect waveguide is known, the user can design, simulate, and include a mask layout for a desired passive devices such as MMIs, and AWGs, which can subsequently be fabricated at the foundry. We describe the technology development towards obtaining a versatile generic-foundry platform which gives users the freedom to design a large variety of photonic-integrated- devices and circuits. Our generic-foundry technology is based on the fabrication process of our commercially-available high-speed- photodiodes and balanced photodiodes (high-frequency response up to and beyond 100 GHz). We have expanded this fabrication process to include a total of three different types of interconnecting waveguides: a low-contrast-, a medium-contrast, and a high-contrast waveguide, as well as transition BBs to couple light from one waveguide type into the other.
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F. M. Soares, F. M. Soares, K. Janiak, K. Janiak, R. G. Broeke, R. G. Broeke, N. Grote, N. Grote, } "Technology development towards a generic InP-based photonic-integration foundry", Proc. SPIE 8001, International Conference on Applications of Optics and Photonics, 800111 (26 July 2011); doi: 10.1117/12.892126; https://doi.org/10.1117/12.892126
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