8 September 2011 Simulation of PDMS microcantilever deflection using integrated optical fibers
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Proceedings Volume 8007, Photonics North 2011; 80071R (2011) https://doi.org/10.1117/12.905799
Event: Photonics North 2011, 2011, Ottawa, Canada
Abstract
In this paper, a fully integrated flow sensor is designed and simulated. The sensor involves three PDMS layers, monolithic integration of microfluidic channels and detection unit. The middle thin layer includes the PDMS microcantilever and the microchannels network. The thin layer is sandwiched between the bottom and top PDMS layers to provide microfluidic environment and to release the cantilever for deflecting. The pressure difference on the cantilever causes the cantilever deflection. The optical fibers are embedded in the optical channels to send the light to the gold deposited cantilever tip and to detect the reflected light. Finite element analysis is done using COMSOL Multiphysics 3.5. Fluid structure interaction is done on the cantilever to find the cantilever defection in response to fluid flow in the microchannels. Optical power loss due to cantilever deflection is simulated by two integrated optical fibers. The numerical results confirm the feasibility of detecting the PDMS cantilever deflection in the range of regular microfluidic fluid flows.
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Amir Sanati Nezhad, Amir Sanati Nezhad, Mahmoud Ghanbari, Mahmoud Ghanbari, Carlos Gustavo Agudelo, Carlos Gustavo Agudelo, Muthu Packirisamy, Muthu Packirisamy, Rama Bhat, Rama Bhat, } "Simulation of PDMS microcantilever deflection using integrated optical fibers", Proc. SPIE 8007, Photonics North 2011, 80071R (8 September 2011); doi: 10.1117/12.905799; https://doi.org/10.1117/12.905799
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