21 October 2011 Slope measurement of a phase object
Author Affiliations +
An interferometric method to measure the slope of phase objects is presented. The analysis was performed by implementing of a polarizing phase shifting cyclic shear interferometer coupled to a grating interferometer. This system can obtain four interference patterns with adjustable phase shifts and variable lateral shear. In order to extract the slope of a phase object, is analyzed the optical phase applying the classical method of phase extraction.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Noel-Ivan Toto-Arellano, Amalia Martínez-García, Juan Antonio Rayas-Álvarez, David-Ignacio Serrano-García, "Slope measurement of a phase object", Proc. SPIE 8011, 22nd Congress of the International Commission for Optics: Light for the Development of the World, 80110P (21 October 2011); doi: 10.1117/12.901964; https://doi.org/10.1117/12.901964

Back to Top