21 October 2011 Microlenses fabrication on glass by combining laser with thermal-reflow technique
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Abstract
We describe a hybrid technique for fabricating microlens arrays on soda-lime glass substrates composed by a direct-laser write and post thermal treatment. In particular we use a nanosecond Q-Switch Nd: YVO4 laser and a mufla Heraeus furnace. Temperature dependence of the reflowing process was analyzed in the range of 620°C-670°C. An improvement in the optical quality of the microlens arrays were obtained as temperature increases. The best microlens array was obtained at 670°C with the following characteristics: diameter 47.89±6.65μm; focal length 510±10μm; and focal spot size 2.82±0.02μm. The presented technique has been shown to be capable of fabricating low cost microlens arrays with good optical quality.
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Daniel Nieto, Daniel Nieto, Justo Arines, Justo Arines, Carlos Gomez-Reino, Carlos Gomez-Reino, Gerard M. O'Connor, Gerard M. O'Connor, M. Teresa Flores-Arias, M. Teresa Flores-Arias, } "Microlenses fabrication on glass by combining laser with thermal-reflow technique", Proc. SPIE 8011, 22nd Congress of the International Commission for Optics: Light for the Development of the World, 80110T (21 October 2011); doi: 10.1117/12.902099; https://doi.org/10.1117/12.902099
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