2 November 2011 Interferometric analysis of polishing surface with a petal tool
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Abstract
In this work, we describe a phase shift interferometric monitoring of polishing processes produced by a petal tool over a spherical surface to obtain a parabolic surface. In the process, we used a commercial polishing machine; the purpose of this work is to have control of polishing time. To achieve this analysis, we used a Fizeau interferometer of ZYGO Company for optical shop testing, and the Durango software from Diffraction International Company. For data acquisition, simulation and evaluation of optical surfaces, we start polishing process with a spherical surface with 15.46 cm of diameter; a 59.9 cm of radius curvature and, with f/# 1.9.
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Alfonso Salas-Sánchez, Alfonso Salas-Sánchez, Irce Leal-Cabrera, Irce Leal-Cabrera, Elizabeth Percino Zacarias, Elizabeth Percino Zacarias, Fermín S. Granados-Agustín, Fermín S. Granados-Agustín, } "Interferometric analysis of polishing surface with a petal tool", Proc. SPIE 8011, 22nd Congress of the International Commission for Optics: Light for the Development of the World, 80111X (2 November 2011); doi: 10.1117/12.903361; https://doi.org/10.1117/12.903361
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