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2 November 2011 Design and fabrication of reconfigurable metamaterial devices using MEMS
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Abstract
This work presents the design, fabrication and characterization of Metamaterial (MTM) structures using MEMS technology for applications in bio-medical optics. Metamaterials can be applied in diverse fields such as Photonic Crystals, Resonant Structures and Transmission Lines. In this work the focus is on Transmission Lines. For this application, the metamaterial structure is based on a Composite Right/Left Handed Transmission Line (CRLH-TL) which consists of MEMS capacitors and inductors. The MEMS capacitor is formed with two parallel plates (two electrodes, one mobile-positive and one fixed-negative), whose capacitance can be varied using electrostatic principles; in addition it acts as a 3D element for metamaterial device tuning.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Georgina Rosas, Roberto Murphy, and Wilfrido Moreno "Design and fabrication of reconfigurable metamaterial devices using MEMS", Proc. SPIE 8011, 22nd Congress of the International Commission for Optics: Light for the Development of the World, 80119L (2 November 2011); https://doi.org/10.1117/12.901849
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