Recent advances in SWIR MEMS-based tunable Fabry-Pérot microspectrometers

J. Antoszewski; T. Nguyen; M. Martyniuk; J. M. Dell; L. Faraone

doi:10.1117/12.883734

21 May 2011 Recent advances in SWIR MEMS-based tunable Fabry-Pérot microspectrometers

J. Antoszewski; T. Nguyen; M. Martyniuk; J. M. Dell; L. Faraone

Author Affiliations +

Proceedings Volume 8012, Infrared Technology and Applications XXXVII; 80121X (2011); doi: 10.1117/12.883734
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

Recent progress in short wavelength infrared MEMS based Fabry-Pérot microspectrometers at The University of Western Australia is presented. The original monolithic approach has been replaced with a hybrid one due to HgCdTe restricting the thermal budget and affecting the quality of structural silicon nitride films. The spectral resolution has been improved by introducing five layer Bragg mirrors and by limiting the electrostatically actuated top mirror bowing and tilting using stress balancing between layers. In effect the FWHM has been reduced to 30nm at ~2.0μm in comparison to the ideal theoretical mid-range value of 9nm. Analysis of mirror profiles shows that this difference is a result of remaining mirror imperfections.

Citation Download Citation

J. Antoszewski, T. Nguyen, M. Martyniuk, J. M. Dell, L. Faraone, "Recent advances in SWIR MEMS-based tunable Fabry-Pérot microspectrometers", Proc. SPIE 8012, Infrared Technology and Applications XXXVII, 80121X (21 May 2011); doi: 10.1117/12.883734; https://doi.org/10.1117/12.883734

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years