20 May 2011 Recent advances in SWIR MEMS-based tunable Fabry-Pérot microspectrometers
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Abstract
Recent progress in short wavelength infrared MEMS based Fabry-Pérot microspectrometers at The University of Western Australia is presented. The original monolithic approach has been replaced with a hybrid one due to HgCdTe restricting the thermal budget and affecting the quality of structural silicon nitride films. The spectral resolution has been improved by introducing five layer Bragg mirrors and by limiting the electrostatically actuated top mirror bowing and tilting using stress balancing between layers. In effect the FWHM has been reduced to 30nm at ~2.0μm in comparison to the ideal theoretical mid-range value of 9nm. Analysis of mirror profiles shows that this difference is a result of remaining mirror imperfections.
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J. Antoszewski, J. Antoszewski, T. Nguyen, T. Nguyen, M. Martyniuk, M. Martyniuk, J. M. Dell, J. M. Dell, L. Faraone, L. Faraone, } "Recent advances in SWIR MEMS-based tunable Fabry-Pérot microspectrometers", Proc. SPIE 8012, Infrared Technology and Applications XXXVII, 80121X (20 May 2011); doi: 10.1117/12.883734; https://doi.org/10.1117/12.883734
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