Advances in freeform optical metrology using a multibeam low-coherence optical probe (Quad-Probe)

Christopher J. Ditchman; Damon W. Diehl; Christopher T. Cotton; Nathan E. Burdick; David Woodlock; Jun Zou

doi:10.1117/12.883933

20 May 2011 Advances in freeform optical metrology using a multibeam low-coherence optical probe (Quad-Probe)

Christopher J. Ditchman, Damon W. Diehl, Christopher T. Cotton, Nathan E. Burdick, David Woodlock, Jun Zou

Proceedings Volume 8016, Window and Dome Technologies and Materials XII; 80160V (2011) https://doi.org/10.1117/12.883933
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

Conformal windows reduce drag, but introduce optical aberrations. Corrector optics minimize such optical aberrations, but they feature complex surfaces that cannot presently be measured interferometrically. To address this problem, ASE Optics has developed a non-contact "Quad-Probe" that measure the position and orientation of surfaces. By scanning the probe over the surface of the optic, a 3D model of the interior and exterior surfaces can be built. Furthermore, the Quad-Probe can be used inside a polishing machine, and feedback from the Quad-Probe can be used to guide the scanner in measuring an unknown part.

Citation Download Citation

Christopher J. Ditchman, Damon W. Diehl, Christopher T. Cotton, Nathan E. Burdick, David Woodlock, and Jun Zou "Advances in freeform optical metrology using a multibeam low-coherence optical probe (Quad-Probe)", Proc. SPIE 8016, Window and Dome Technologies and Materials XII, 80160V (20 May 2011); https://doi.org/10.1117/12.883933

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