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20 May 2011Interferometric tomography: a new tool for metrology on conformal optics
Fabrication and measurement of conformal aerodynamic windows and domes to precise optical tolerances from ceramic
materials remains a problem. This paper describes the development of the Interferometric Tomography inspection
system, based on a new method for wavefront and surface metrology on optics with very high aberrations. The
metrology system is a modular attachment for integrating a standard commercial interferometer with an existing optical
fabrication tool. The system will enable high precision measurement of infrared windows and domes in the process of
their fabrication, until finished to specification. The capability for fabrication and metrology of aggressively aspheric
optics, "aberrated by design", will enable new optical designs of higher performance and lower cost, compared to
existing optics.
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Mikhail Gutin, Olga Gutin, Xu-Ming Wang, Dennis Ehlinger, "Interferometric tomography: a new tool for metrology on conformal optics," Proc. SPIE 8016, Window and Dome Technologies and Materials XII, 80160X (20 May 2011); https://doi.org/10.1117/12.887023