Interferometric tomography: a new tool for metrology on conformal optics

Mikhail Gutin; Olga Gutin; Xu-Ming Wang; Dennis Ehlinger

doi:10.1117/12.887023

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20 May 2011 Interferometric tomography: a new tool for metrology on conformal optics

Mikhail Gutin; Olga Gutin; Xu-Ming Wang; Dennis Ehlinger

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Proceedings Volume 8016, Window and Dome Technologies and Materials XII; 80160X (2011) https://doi.org/10.1117/12.887023
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

Fabrication and measurement of conformal aerodynamic windows and domes to precise optical tolerances from ceramic materials remains a problem. This paper describes the development of the Interferometric Tomography inspection system, based on a new method for wavefront and surface metrology on optics with very high aberrations. The metrology system is a modular attachment for integrating a standard commercial interferometer with an existing optical fabrication tool. The system will enable high precision measurement of infrared windows and domes in the process of their fabrication, until finished to specification. The capability for fabrication and metrology of aggressively aspheric optics, "aberrated by design", will enable new optical designs of higher performance and lower cost, compared to existing optics.

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Mikhail Gutin, Olga Gutin, Xu-Ming Wang, and Dennis Ehlinger "Interferometric tomography: a new tool for metrology on conformal optics", Proc. SPIE 8016, Window and Dome Technologies and Materials XII, 80160X (20 May 2011); doi: 10.1117/12.887023; https://doi.org/10.1117/12.887023

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