A Novel Optoelectronic Instrument For On-Line Precise Measurements

A, Woithuis; K. Biising; L. Bource; G. Dalessi

doi:10.1117/12.967110

1 January 1987 A Novel Optoelectronic Instrument For On-Line Precise Measurements

A, Woithuis, K. Biising, L. Bource, G. Dalessi

Proceedings Volume 0802, In-Process Optical Metrology for Precision Machining; (1987) https://doi.org/10.1117/12.967110
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

A novel highly precise distance measurement tool is introduced. Using an optical autofocussing head and a backlash free mechanical translation mechanism, it is possible to reach a resolving power of 0.1 micron and an absolute accuracy of better than 1 micron in combination with a measurement range of 40 millimeters. Due to the character of the autofocus it is also possible to recognize on-line the inclination and curvature of the surface.

Citation Download Citation

A, Woithuis, K. Biising, L. Bource, and G. Dalessi "A Novel Optoelectronic Instrument For On-Line Precise Measurements", Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); https://doi.org/10.1117/12.967110

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