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1 January 1987 Converting A Commercially Available Linnik Microinterferometer Into A Fringe Scanning Optical Profiler
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Proceedings Volume 0802, In-Process Optical Metrology for Precision Machining; (1987) https://doi.org/10.1117/12.967120
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands
Abstract
As a low cost approach to fringe scanning profilometry, a commercially available Linnik microinterferometer was equipped with a CCD array, interfaced to an IBM PC. The instrument's potentials and limitations will be discussed.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
B. Cencic, M. Barut, and F. Cepon "Converting A Commercially Available Linnik Microinterferometer Into A Fringe Scanning Optical Profiler", Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); https://doi.org/10.1117/12.967120
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